拉曼面扫描表征氮掺杂6H-SiC晶体多型分布
郭啸1,2, 刘学超1, 忻隽1, 杨建华1, 施尓畏1

Characterization of Polytype Distributions in Nitrogen-doped 6H-SiC Single Crystal by Raman Mapping
GUO Xiao1,2, LIU Xue-Chao1, XIN Jun1, YANG Jian-Hua1, SHI Er-Wei1
图3 晶锭中8片晶片的6H-SiC多型分布图
Fig. 3 Spatial characterization images of 6H-SiC in 8 wafers from the same ingot a 4 th -6H; b 8 th -6H; c 11 th -6H; d 14 th -6H; e 18 th -6H; f 22 nd -6H; g 26 th -6H; h 30 th -6H The color represents matching degree between the Raman spectra of test points and the standard Raman spectra of 6H-SiC