碳纳米管/金属接触改善方法的研究进展

陈长鑫, 金铁凝, 张亚非

Progress in Improvement Methods of Carbon Nanotube/Metal Contact

CHEN Chang-Xin, JIN Tie-Ning, ZHANG Ya-Fei

图4 三个样品CNT二端电阻随热处理温度的关系图 [ 7 ]
Fig. 4 Contact resistance as a function of the rapid thermal annealing RTA tem-perature for three different nanotube#cod#x02013;Ti#cod#x02013;Au electrodes [ 7 ]