电镀铬-金刚石复合过渡层提高金刚石膜/基结合力

邱万奇, 潘建伟, 刘仲武, 余红雅, 钟喜春, 曾德长

Improvement of Adhesive Strength of Diamond Films by Plating Cr-diamond Composite Interlayer

QIU Wan-Qi, PAN Jian-Wei, LIU Zhong-Wu, YU Hong-Ya, ZHONG Xi-Chun, ZENG De-Chang

图2 经第一步a和第二步b沉积工艺制备样品的XRD图谱
Fig. 2 XRD patterns of the sample prepared after first a and second b step fabrication