射频磁控溅射 Ba0.6Sr0.4TiO3薄膜表层的XPS研究
唐章东,杨传仁,廖家轩,张继华,冷文建,陈宏伟,符春林
XPS Study of the Surface Layer of Ba0.6Sr0.4TiO3 Thin Films Deposited by Radio Frequency Magnetron Sputtering
TANG Zhang-Dong,YANG Chuan-Ren,LIAO Jia-Xuan,ZHANG Ji-Hua,LENG Wen-Jian,CHEN Hong-Wei,FU Chun-Lin
无机材料学报
.
2006, (3): 713
-718
.
DOI: 10.3724/SP.J.1077.2006.00713
