高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层结构调控与性能研究
吴志立, 李玉阁, 吴 彼, 雷明凯
Microstructure Controlling and Properties of TiAlSiN Nanocomposite Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering
WU Zhi-Li, LI Yu-Ge, WU Bi, LEI Ming-Kai
无机材料学报
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2015, (12): 1254
-1260
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DOI: 10.15541/jim20150096
