退火温度对 a-C:H 膜结构及摩擦学性能的影响
王永霞, 冶银平, 李红轩, 吉利, 陈建敏, 周惠娣
Effect of Annealing Temperature on the Structure andTribological Propertyof a-C:H Film
WANG Yong-Xia, YE Yin-Ping, LIHong-Xuan, JI Li, CHEN Jian-Min, ZHOUHui-Di
无机材料学报
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2011, (2): 209
-213
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DOI: 10.3724/SP.J.1077.2011.00209
