激光化学气相沉积快速生长高取向TiN<SUB><EM>x</EM></SUB>薄膜的研究

公衍生,涂溶,後藤孝

High-speed Deposition of Oriented TiN_x Films by Laser Metalorganic Chemical Vapor Deposition

GONG Yan-Sheng,TU Rong,GOTO Takashi

无机材料学报 . 2010, (4): 391 -395 . DOI: 10.3724/SP.J.1077.2010.00391