化学气相沉积碳化硅的热力学分析
卢翠英,成来飞,张立同,徐永东,赵春年
Equilibrium Prediction of the Role of Key Species in the Chemical Vapor Deposition of Silicon Carbide
LU Cui-Ying,CHENG Lai-Fei,ZHANG Li-Tong,XU Yong-Dong,ZHAO Chun-Nian
无机材料学报
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2008, (6): 1189
-1192
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DOI: 10.3724/SP.J.1077.2008.01189
