硅碳比对Si(111)表面SSMBE异质外延SiC薄膜的影响

刘忠良,任鹏,刘金锋,徐彭寿

Effect of Different Si/C flux Ratios on the Growth of SiC on Si (111) by SSMBE

LIU Zhong-Liang,REN Peng,LIU Jin-Feng,XU Peng-Shou

无机材料学报 . 2008, (3): 549 -552 . DOI: 10.3724/SP.J.1077.2008.00549