交替中间热处理BST薄膜介电性能研究
廖家轩,魏雄邦,潘笑风,张 佳,傅向军,王洪全
Study of Dielectric Properties of BST Films Preheated Alternately
LIAO Jia-Xuan,WEI Xiong-Bang,PAN Xiao-Feng,ZHANG Jia,FU Xiang-Jun,WANG Hong-Quan
无机材料学报
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2009, (5): 962
-966
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DOI: 10.3724/SP.J.1007.2009.00962
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