氟化镁基底上HfO2中间层对Al2O3薄膜微观组织和力学性能的影响

doi:10.15541/jim20160030

Journal of Inorganic Materials ›› 2016, Vol. 31 ›› Issue (7): 779-784.doi: 10.15541/jim20160030

• Orginal Article • Previous Articles

Effects of HfO₂ Interlayer on Microstructure and Mechanical Property of Al₂O₃ Thin Film on MgF₂ Substrate

Bo SONG^1,²(), Li-Li ZHAO¹, Xiao-Ying CHEN¹, Li-Jun YOU¹, Li-Xin SONG¹()

1. Key Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
2. University of Chinese Academy of Sciences, Beijing 100049, China

Received:2016-01-15 Online:2016-07-20 Published:2016-06-22
About author:SONG Bo(1989–), male, candidate of master degree. E-mail: songbo@shanghaitech.edu.cn

Abstract

Abstract:

Al₂O₃ thin films with or without HfO₂ interlayer between Al₂O₃ and substrate were deposited on MgF₂ substrates by electron-beam evaporation technique. The as-deposited thin films were then annealed at 600℃ for 1 h to promote crystallization. The microstructure, IR transmittance and mechanical properties of the as-deposited and annealed samples were investigated by field emission scanning electron microscopy (FE-SEM), grazing incidence X-ray diffraction (GIXRD), Fourier Transform Infrared (FTIR) spectrometer, nanoindentation, and scratch tests, respectively. FE-SEM results show that a new branch-like layer is generated in annealed HfO₂/Al₂O₃double-layer thin films. The hardness of the newly formed layer is considered to be larger than 17.5 GPa. Because of the high hardness of the new layer, the MgF₂substrate can be protected from being drown out during scratch test. From GIXRD patterns, Al₂O₃ still remains amorphous while HfO₂ interlayer transforms from amorphous to monoclinic phase after annealing process. It could be deduced that it is the phase transformation of HfO₂ interlayer that promotes the formation of the harder branch-like layer.

Key words: HfO2 interlayer, Al2O3 thin film, microstructure, mechanical properties, MgF2 substrate

CLC Number:

TQ174

Bo SONG, Li-Li ZHAO, Xiao-Ying CHEN, Li-Jun YOU, Li-Xin SONG. Effects of HfO₂ Interlayer on Microstructure and Mechanical Property of Al₂O₃ Thin Film on MgF₂ Substrate[J].Journal of Inorganic Materials, 2016, 31(7): 779-784.

Figures/Tables 5

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Effects of HfO₂ Interlayer on Microstructure and Mechanical Property of Al₂O₃ Thin Film on MgF₂ Substrate

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