Journal of Inorganic Materials ›› 2016, Vol. 31 ›› Issue (7): 779-784.DOI: 10.15541/jim20160030
• Orginal Article • Previous Articles
SONG Bo1, 2, ZHAO Li-Li1, CHEN Xiao-Ying1, YOU Li-Jun1, SONG Li-Xin1
Received:
2016-01-15
Online:
2016-07-20
Published:
2016-06-22
About author:
SONG Bo(1989–), male, candidate of master degree. E-mail: songbo@shanghaitech.edu.cn
CLC Number:
SONG Bo, ZHAO Li-Li, CHEN Xiao-Ying, YOU Li-Jun, SONG Li-Xin. Effects of HfO2 Interlayer on Microstructure and Mechanical Property of Al2O3 Thin Film on MgF2 Substrate[J]. Journal of Inorganic Materials, 2016, 31(7): 779-784.
Fig. 4 Mechanical properties obtained from nanoindentation tests (a) Elastic modulus as a function of penetration depth for as-deposited and annealed samples; (b) Hardness as a function of penetration depth for the same samples
Fig. 5 SEM images of scratch tracks of the as-deposited and annealed samples.(a) A1; (b) A2; (c)AH1; (d) AH2; (e) Higher resolution image of the selected area in Fig. 5(d)
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